Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Batch Wafer ID Reader
​WHS150R

WHS150R is mainly designed for 6" wafer size. This system is suitable for SEMI Standard 6" 25 slots Open Cassette and it comes with built-in programmable wafer orientation flat alignment. This is to ensure that the wafer is in a right orientation before scanning the ID. Moreover, WHS150R is equipped with Multi-Touch Panel PC & Graphic User Interface (GUI) customization.
Specifications
  • Foot Print:  1670(L) x 1380(W) x 1800(H)mm
  • Wafer Size: 8" & 12" (Automatic Coversion)
  • Input Carrier: 12" FOUP, 12" FOSB & 8" Open Cassette (SEMI Standard)
  • Load Port: 2 (Upgradeable to 3 (Hirata Load Port)
  • Power: 230V AC ± 10% @ 13A 50Hz
  • Temperature: 20°C - 28°C
  • Humidity: 40% - 60%
  • ​Vacuum: -650mmHg
Please contact us for more information