Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Batch Wafer Transfer
​WHS300G

WHS300G is designed for wafer transferring, splitting, merging or flipping 6" and 8" wafer from the input cassette to the output cassette in batch mode. Input cassette type is SEMI standard open cassette with 26-slot, 25-slot and 13-slot. There are 4 load ports available with 3 inputs load ports and 1 output load port. The system is equipped with high accuracy reflective sensor for wafer protrusion detection.
Specifications
  • Foot Print:  1920(L) x 900(W) x 2050(H)mm
  • Wafer Size: 150mm & 200mm Silicone Wafer
  • Input Cassette Type: SEMI Standard Open Cassette with 13-Slot, 25-Slot & 26-Slot
  • Load Port: 4, 3 input & 1 output
  • Power: 220V AC ± 10% @ 13A 50Hz
  • Temperature: 20°C - 28°C
  • Humidity: 40% - 60%
Please contact us for more information