Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

White Light Interferometric Microscopes
High-Speed Model

BW-Series - Accurate sub-nano-surface profiler with non-contact measurement. Nikon’s proprietary scanning-type optical interference measurement technology achieves 1 picometer (pm) height resolution. Nikon offers a variety of optical microscopes as measurement systems to suit a wide range of measurement applications.

Key Benefits
  • Realizes 0.1 nm-level measurements of ultra-smooth surfaces with neither averaging nor filtering process
  • Enables measurement of both smooth and rough surfaces without changing measurement mode or optical filters
  • Wide range of observation methods
  • SiC Wafer: Sub-nano-level measurement in a wide range of magnification
Specifications
  • Measurement optical system: Focus Variation with White Light Interferometry (FVWLI)
  • Height resolution (algorithm): 1 pm (0.001 nm)
  • Step height measurement reproducibility: σ8nm / 8m step height measurement
  • Number of pixels: 510x510
  • Height measurement time: 4 s / 10 μm scan
  • Measurement field size: < 2015 x 2015 μm *
Please contact us for more information