Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

In-Line XRF Analyser
MFM 310

The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.

The MFM310 is designed with high-volume 200mm and 300mm manufacturing in mind: high-throughput thickness measurement by XRR and XRF, low-contamination wafer handling and pattern recognition-based position control for product wafer measurements, CE Marking and S2/S8 Compliance for semiconductor production clean room operation, compliance with GEM-300/HSMS and factory automation standards, high-reliability machine performance and low power consumption and cost of ownership.

Key benefits
  • Micro-spot X-ray beams and pattern recognition
  • High-throughput, product-wafer measurements
  • Wide range of materials and applications
  • High resolution and precision covering thicknesses from Ångstroms to microns
  • For 200mm and 300mm wafers
  • Available with 300mm factory automation
  • Design based on SEMI S2 and SEMI S8
Applications
  • Micro-XRR: film thickness, density, and roughness measurement
  • Micro-XRF: film thickness and composition measurement
  • Micro-XRD: phase, crystallinity, and preferred orientation evaluation
  • Thickness measurement of ultrathin films from 1nm
  • Multilayer dielectric film measurement by XRR
  • Multilayer metal film measurement by XRF
  • Multilayer metal film measurement by XRF
  • Evaluation of crystallinity and preferred crystal orientation by XRD

Specs & Applications
  • Wafer size: 300mm, 200mm
  • Load port: FOUP, 2 load ports
  • MFM310 Dimensions: 140W x 341D x 205H (cm)
  • Heat exchanger dimensions: 36W x 83.6D x 85H (cm)
  • MFM310 power requirements: 3-phase, 208VAC, 20A, avg., 2kVA
  • Heat exchanger power requirements: 1-phase, 208VAC, 8A, avg., 0.5kVA
  • Compressed, dry air requirements: 0.5 to 0.7 MPa, 20 l/min
  • Vacuum requirements: -80 kPa, 20 l/min
Please contact us for more information