Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

In-Line XRF Analyser
MFM 310

The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.

The MFM310 is designed with high-volume 200mm and 300mm manufacturing in mind: high-throughput thickness measurement by XRR and XRF, low-contamination wafer handling and pattern recognition-based position control for product wafer measurements, CE Marking and S2/S8 Compliance for semiconductor production clean room operation, compliance with GEM-300/HSMS and factory automation standards, high-reliability machine performance and low power consumption and cost of ownership.

Key benefits
  • Micro-spot X-ray beams and pattern recognition
  • High-throughput, product-wafer measurements
  • Wide range of materials and applications
  • High resolution and precision covering thicknesses from Ångstroms to microns
  • For 200mm and 300mm wafers
  • Available with 300mm factory automation
  • Design based on SEMI S2 and SEMI S8
Applications
  • Micro-XRR: film thickness, density, and roughness measurement
  • Micro-XRF: film thickness and composition measurement
  • Micro-XRD: phase, crystallinity, and preferred orientation evaluation
  • Thickness measurement of ultrathin films from 1nm
  • Multilayer dielectric film measurement by XRR
  • Multilayer metal film measurement by XRF
  • Multilayer metal film measurement by XRF
  • Evaluation of crystallinity and preferred crystal orientation by XRD

Specs & Applications
  • Wafer size: 300mm, 200mm
  • Load port: FOUP, 2 load ports
  • MFM310 Dimensions: 140W x 341D x 205H (cm)
  • Heat exchanger dimensions: 36W x 83.6D x 85H (cm)
  • MFM310 power requirements: 3-phase, 208VAC, 20A, avg., 2kVA
  • Heat exchanger power requirements: 1-phase, 208VAC, 8A, avg., 0.5kVA
  • Compressed, dry air requirements: 0.5 to 0.7 MPa, 20 l/min
  • Vacuum requirements: -80 kPa, 20 l/min
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