Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

 Laboratory Alloy and Nanolayer System ( LANS )

The Laboratory Alloy and Nanolayer System ( LANS) is 4Wave’s Flagship R&D system. This system has received wide acceptance in the academic materials research world. Equipped with multiple processing targets, it is a very versatile platform for multilayer material synthesis and compositional nanotechnology.

Markets Include
  • Optics
  • Magnetic sensors
  • University Research & Development
Applications
  • Materials Research and Development

Specifications
  • High output, low-energy plasma source
  • 6 x 4″ biased target carousel
  • independent target biasing for alloy composition control
  • 100mm diameter process surface
  • <3% non-uniformity over 75 mm
  • substrate plasma cleaning, etching oxidation, nitridation
  • Water cooled, rotating, magnetic, shuttered stage, heating up to  600 C
  • Single wafer load lock stage
Please contact us for more information