Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Manual Wafer Measurement Tools
​MX 20x

The E+H geometry gauges are based on two heavy plates mounted parallel to each other. Embedded in the plate is a set of capacitive distance sensors. The wafer will be moved manual or automatically between the plates and measured without any movement.
Applications
  • Incoming inspection of Wafers
  • R&D
  • Qualification of processes
  • In process control for
  • Thickness (e.g. backend)
  • TTV
  • Warp, FPD
  • Stress

Specifications
  • Sensor:  Single point wafer geometry gauge
  • Wafer size:  Up to 300 mm
  • Thickness range:  From 10µm
  • Accuracy:  1µm
  • Resolution:  0.1µm
  • Loading:  Manual
Please contact us for more information