Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Manual Wafer Measurement Tools
MX 30x

The E+H geometry gauges are based on two heavy plates mounted parallel to each other. Embedded in the plate is a set of capacitive distance sensors. The wafer will be moved manual or automatically between the plates and measured without any movement.
Applications
  • R&D
  • In process control for
  • Thickness
  • TTV

Specifications
  • Sensor:  Multiple point wafer geometry gauge
  • Wafer size:  Up to 450 mm
  • Thickness range:  From 50µm
  • Accuracy:  1µm
  • Resolution:  0.1µm
  • Loading:  With or without Robots Handling point
Please contact us for more information