Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Manual Wafer Measurement Tools
​MX 60x

The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.

*1 Option/Feature of MX 604-ST, MX 608, MX 608-q and MX 6012
*2 Option of MX 608, MX 608-q and MX 6012 
Applications
  • Wafer manufacturing
  • Reclaimer
  • R&D
  • In process control forThicknessTTVResistivity / Sheet ResistanceRRV (partially)Dopant

Specifications
  • Sensor:  Multiple point wafer geometry gauge
  • Wafer size:  Up to 450 mm
  • Thickness range: Max 900µm
Please contact us for more information