- Loading Detection Section
- Stress range: 1mN - 1500mN
- Resolution: 0.3mN
- Allowable Overload
- 3000% full scale
- Friction Force Detection
- Signal Output: Velocity Signal
- Frequency Range: 20Hz - 10kHz
- Excitation Section
- Excitation Frequency: 45Hz
- Width of Excitation: 0, 5, 10, 20, 40, 50, 80, 100µm
- Radius of Stylus
- X - Z axis (scratch / loading direction drive)
- Driving System: Steeping Motor Drive
- Moving Range: 20mm
- Drive Resolution: 0.5µm
- (X) Moving Speed: 0 - 20µm/sec
- (Z) Moving Speed: 0.1 - 1µm/sec0