Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Non-Contact Surface Profiling System
 MP2100

The MP2100 is Chapman Instruments’ latest high-resolution profiler. Specially designed for surface measurements and analysis, it can be used as both a production tool for inline quality inspection, as well as a research and development tool for establishing standards and researching tolerances. The MP2100 utilizes the same non-contact measurement technology as other Chapman profilers. Users can make either high-resolution linear or circular scans quickly. The powerful, yet user-friendly, Windows® based operational software can be programmed to execute a series of routines and report the data off-line for further analysis. Password security and event viewer/error logging are standard with Chapman software. Robotic handling for 150 mm, 200 mm and 300 mm wafers is available as an option.

Key Features
  • Non-contact scanning
  • 0.01 nm height resolution
  • 50 nm data sampling
  • 0.50 µm lateral resolution
  • Fast, complete circular scans (360° around wafer surface)
  • Nomarski Viewing System for high definition visual inspection
  • Scan lengths ranging from µm to complete circumferences (200 or 300 mm wafer)
  • Roughness and waviness data from a single scan
  • Non-contact 3D scans
  • Automated sample positioning (X, Y, theta)
Specifications
  • Vertical resolution:  0.01nm
  • Horizontal resolution:  0.5µm
  • Linear Scan Length:  Complete circumference of wafer
  • X and Y stage resolution:  1µm
  • Theta Stage Resolution:  0.001°
  • Data Sampling:  50 nm (minimum)
Please contact us for more information