Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Plasma Cleaning System (In-Line)
QML-CI

QML-CI is a compact inline plasma cleaning system suitable for handling boats, Auer boats and ceramic substrates. It includes all the subassemblies necessary to deliver excellent cleaning and surface modification results. The features contained in this system allow a reliable and repeatable cycling of the plasma process for 24/7 operation.

This inline system includes:
A belt conveyor and an indexer which receive the substrate from upstream and make it available for the 1 lane plasma chamber. The indexer has the unique feature of offloading the substrate in the plasma chamber while it is loading a new one at the same time. An output belt conveyor acts as buffer and represents the substrate to the downstream system, via SMEMA 1.2 protocol (ASM™ protocol available).

Applications
  • Cleaning of copper lead frames prior to wire bonding
  • Organic decontamination prior to wire bonding
  • Adhesion promoter prior to molding
  • Adhesion promoter of die attach materials on lead frames or PBGA strips
  • Flux removal from semiconductor packages or hybrids
  • General activation, cleaning and decontamination
  • Auer Boats and other boat types
  • Ceramic substrates

Specifications
  • Dimensions: 1432x1210x1677h mm (including Monitor and Tower Light)
  • Weight: 375 kg
  • Power: Single Phase 110-240V 50/60 Hz, 2.5 KVA
  • Air: Dry 3—6 bar
  • Exhaust port: 25mm OD
  • Safety interlocks
Please contact us for more information