Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Specialty Chemicals

Gas: Ammonia (NH3)
The various high-purity ammonia gas products used in semiconductor, LCD, solar cell and LED

Chemicals 
CVD, ALD Materials, HF, BOE, CMP Slurry

Solar cell materials
Process chemicals and thin-film materials for crystalline solar cells and thin-film solar cells
Specifications
  • Gas:  NH3 (White grade, VLSI, MB3)
  • Chemicals:  Tetraethoxysilane, Boron Tribromide, Phosphorous Oxychloride, Tii/TiN Precursors, etc.
  • CMP Slurry:  IILD/IMD, STI/SOQ, Cu BM, TSV, etc.
  • Texturing: HF, HNO3
  • Diffusion: POCL3, BBr3
  • Etch & Cleaning: HF, BOE, HCl
  • Passivation: TEOS/TCO, DEZ
  • Poly Si Cleaning: HF, HNO3
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