Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

UV Irradiator
EXR-1200 FMUV

Teikoku UV Irradiation equipment is designed with simplicity in mind for greater MTBF and MTTR for a lower cost of ownership. The UV intensity and exposure are controlled in real time and it automatically adjusts itself by providing proper exposure dosage limits. The dosage limits can be set in recipe control.

Features:
  • UV Irradiation equipment for dicing tape. For wafers up to 300mm
  • All parameters important for UV irradiation can be controlled in the recipe
  • Settings can be quickly changed to process different wafer/frame sizes
  • Longer-lasting UV lamp realized by TTS's proprietary UV technology
  • Other optional features are available
Specifications
  • Power: AC200 - 240V, Single Phase
  • Power Consumption: 3KVA (With UV)
  • Clean Air Pressure (CDA): 0.5 - 0.6 MPa (Min Flow Rate: 120NL/min)
  • Vacuum: 650 - 750mHg (Min Flow Rate: 60NL/min)
  • Nitrogen (For UV): 0.2 - 0.4 Mpa (Min Flow Rate: 20NL/min
  • Exhaust Duct Capacity: 1.03/min, 10mmH2O (100 diameter SUS Flange duct connection)
  • Dimension: 1350 x 1250 x 1800
  • Net weight: Approx 500kg
Please contact us for more information