Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

NWL200
Wafer Loader for IC Inspection

The NWL200 series is the first lineup of wafer loaders for inspection microscopes capable of loading 100 micron thin wafers. Thanks to a new chuck system, the NWL200 series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer-sensing functions also help prevent damage to wafers.

Key Benefits
  • Anti-Contamination Measures
  • High-Reliability
  • Macro Inspection Functions
  • Features Geared for Maximum Throughput​
  • Wafer-Slot Buttons
  • New Chuck System Supports 100µm Wafers
  • Improved Wafer-Sensing Functions
Specifications
  • Compatible wafer size: Diameter 200mm / 150mm 1
  • Compatible wafer size: Thickness (standard) 300µm
  • Compatible wafer size: Thickness (thin wafer option) 300~100µm
  • Compatible carrier SEMI 25 (26) wafer carrier 2
  • Centering Non-contact, photoelectric sensors
  • Notch/orientation flat detection Non-contact, photoelectric sensors
  • Operation/display section Wafer slot buttons and interactive LCD interface
  • External dimensions (WxDxH) 535 x 626 x 350
  • Weight 50kg
  • Safety standards Electrical safety: CE mark compatible
  • SEMI: S2-0706, S8-0307, F47 compatible
  • Laser safety: FDA Class 1
  • Utilities Power supply: AC 100~240 V, 50/60 Hz, 1.5 A~0.7 A
  • Vacuum: -80kPa
  • Connection tube diameter: 6mm
Please contact us for more information