Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Wafer Packing System
WHS3800

WHS3800 is designed to handle 6" and 8" wafer size for packing and unpacking wafer. It comes with 2 port for Open Cassette and 2 ports for Canister. The system is equipped with Wafer Pre-Aligner for wafer positioning accuracy and orientation. It comes with the built-in Vision Sensor and Height Sensor for robotic wafer handling accuracy. WHS3800 is capable of splitting, merging and sorting the wafers.
Specifications
  • Footprint:  1200(L) x 950(W) x 1650(H)mm
  • Wafer Carrier Type: SEMI Standard Open Cassette & Canister
  • Load Port: 4 Load Port (2 Open Cassette & 2 Canister)
  • Wafer Size: Designed for 150mm (6") & 200mm (8") wafer
  • Power: 240VAC± 10% @ 13A 50Hz
Please contact us for more information