WHS3800 is designed to handle 6" and 8" wafer size for packing and unpacking wafer. It comes with 2 port for Open Cassette and 2 ports for Canister. The system is equipped with Wafer Pre-Aligner for wafer positioning accuracy and orientation. It comes with the built-in Vision Sensor and Height Sensor for robotic wafer handling accuracy. WHS3800 is capable of splitting, merging and sorting the wafers.
Specifications
Footprint: 1200(L) x 950(W) x 1650(H)mm
Wafer Carrier Type: SEMI Standard Open Cassette & Canister
Load Port: 4 Load Port (2 Open Cassette & 2 Canister)
Wafer Size: Designed for 150mm (6") & 200mm (8") wafer