Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Wafer Tape Mounter
​EXM2-1200X

Thin wafer handling capability of Teikoku Wafer Mounting equipment are top performers in the industry. With the option of thin wafer handling, special end effector, range of thin, ultra thin and warped wafers is a major plus for our tools.

Features:
  • A wafer tape mounter for wafers of 300,, (optionally available: 8 inches)
  • All parameters important for attaching a wafer onto a frame can be controlled in the recipe
  • Can be used with ultra-thin wafers (such as shaped or reworked wafers)
  • Inline UV irradiation and BG de-taping features available (Options)
  • Longer lasting UV lamp realized by TTS's proprietary UV Technology
  • Other optional features are available
Specifications
  • Power: AC200 - 240V, Single Phase
  • Power Consumption: 2KVA (Without UV) 3KVA (With UV)
  • Clean Air Pressure (CDA): 0.5 - 0.6 MPa (Min Flow Rate: 120NL/min)
  • Vacuum: 650 - 750mHg (Min Flow Rate: 60NL/min)
  • Nitrogen (For UV): 0.2 - 0.4 Mpa (Min Flow Rate: 20NL/min
  • Exhaust Duct Capacity: 1.03/min, 10mmH2O (100 diameter SUS Flange duct connection)
  • Dimension: 1900 x 2500 x 1900
  • Net weight: Approx 1800kg
Please contact us for more information