Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information

Wet Gas Abatement System
MAT520W

The MAT502W gas scrubber system is designed to remove or reduce substantially the hazard presented by some gases used during semiconductors manufacturing process. To achieve this, the scrubber captures the gases via water dissolution for water-soluble gases or changes the chemical composition of them through reaction with water especially in high flow application, for each gas concentration exiting the scrubber is reduced to a level below 1/2 IDLH.
Specifications
  • Power: A/C 200~240V, 3phase, 15Amp
  • N₂: 4~7kgf/cm²(15slm), 1/4″Swagelok, Inlet Purge
  • City Water: 3~5kgf/cm²(8ℓ/min), 1/2″PVC Pipe
  • Gas Inlet: NW50 Flange NW40
  • Drain: Acid Drain
  • Natural Drain : 40A PVC Pipe
  • Power Drain: 26mm PVC Pipe
  • Gas Exhaust: -50~-100mmH2O, 1m³/min, 50mm PVC Pipe
  • Cabinet Exhaust: -50mmH2O, 1m³/min, 75mm PVC Pipe
Please contact us for more information