Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

1st Optical Inspection System
WIS1000

WIS1000 is designed to handle 6” wafer and 8” wafer size. The standard designed comes with one standard load port which can accommodate the 6” SEMI Standard Open Cassette and 8” SEMI Standard Open Cassette. The system capable for inspection, wafer mapping and defects classification management. WIS1000 integrated with Nikon Wafer Auto-Loader and programmable XY indexing table for macro and micro inspection. It can perform macro inspection not only for the front wafer as well as the back wafer and micro inspection. Inker module can be integrated with the system for the defect marking during the inspection.
Specifications
  • Designed for 6" and 8" wafer inspection.
  • Automatic wafer loading and unloading with OCR reader.
  • Programmable XY stages with point-and-shoot wafer alignment algorithms.
  • Wafer Mapping and simple defect classification.
  • Anti-vibration platform ensuring good images during the micro inspection.
  • Ergonomic design based on SEMI S2/S8 requirement.
  • Optional Inking module for Reject Identification
  • Optional SECS/GEM communication for wafer map and recipe transfer
Please contact us for more information