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Load Lock Etch System

The 4Wave Load Lock Etch System is a flagship product addressing several significant markets. This system boasts high-performance etching, critical thin film profile milling, glancing angle milling, etc. 4Wave Single Wafer Load Lock Etching Systems addresses the needs of customers seeking a flexible, cost-effective, small-footprint, ion-etching/ion processing workhorse for general purpose research and production applications.

Markets Include
  • Semiconductor
  • Data Storage
  • MEMS
  • Wafer processing services
Please contact us for more information