Nikon’s excellent optics give high accuracy and repeatability across the field of view, increasing speed of measurement. VMZ-S3020 offers a 300 x 200 x 200 (X x Y x Z)mm stroke suitable for measurement of small semiconductor, electronic and mechanical components.
With the growth of self-driving car sensor technology alongside the full EV market of automotive industry, the number of electronic components required and installed are greatly increasing. Strict quality control is required for these critical components and so expectations for shop floor measuring equipment is getting higher.
Nikon provides the “NEXIV VMZ-S” series suitable for measuring these challenging applications.
High accuracy within the field of view (FOV) – Accuracy within FOV (PF2D,PFV2D) is speciﬁed. Nikon designed optics to deliver high-quality images and realize accurate measurement data. Proving error* PF2D0.8µm
Type2 zooming head. Determined by Nikon’s in-house measurement method. Measurement of the perimeter of a circular reference device. This involves stage movement so a video caliper tool within the FOV, is evenly placed at 25 points on the perimeter.
Probing error of the imaging probe* PFV2D 0.3 µm
Improvement of throughput – Throughput has improved by realizing faster short-distance stage movements. This contributes to the shortening of the measurement time.
New Design – Along with the exterior design change, the joystick used for stage and optical head movements has been redesigned to make machine operation easier and less tiring during long periods of use.
Measurement programming support – Dimension software NEXIV AutoMeasure realizes high precision / high speed / easy measurement with many valuable functions. An important new function supports the measurement program creation processes. By selecting the measurement point, several settings are handled by the system and measurement program code is created automatically.*
Digital operation guide NEXIV Note – This function offers slides and movie output together with NEXIV contents, such as basic operations and functions. Simple measurement programs can be created easily by using to this application.
Standard magnification zooming heads: type 1 – 3 – Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They all come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.
High magnification zooming heads: type 4, TZ – Type 4 and TZ models have Nikon’s 15× and 120× zoom optics with higher magnification and highest NA of 0.46.
Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.
Wide field-of-view zooming head: type A – Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the higher NA of 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.
Detection of 0.1 mm transparent layer – Designed to detect the surfaces of thin transparent materials, the new TTL Laser AF works with the same high speed and high accuracy as the VMR series Laser AF.
8-segment ring illumination with three incident angles – Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.
15x High-speed Zoom – A 5-step, high-speed optical zoom with a zoom ratio of 15:1 allows both wide field-of-view at low magnification and highest-resolution observation at the maximum magnification position (type 1 – 4).