PMS(POWDER MOVING SYSTEM)
Prevents powder coalescence by shooting out nitrogen gas.
PMS can solve clogging issue when byproducts are formed during the semiconductor and FPD process by shooting out hot N2 into exhaust lines.
EPD(EXHAUST PRESSURE DETECTOR)
Real-time monitoring of exhaust pressure about the phenomenon of exhaust line clogging
EPD system can monitor clogging issues in pipe lines and predict PM. In addition, it can prevent and pre-sense physical losses,
such as Gas leakages, Vacuum pump trip (occurrence of wafer accident and repair cost), etc.
FLEXIBLE HEATING PIPE
Simplified and optimized complex exhaust lines with interlock designed triple piping structure.
Induces regular fluid flow by heating the pipe itself and prevents sedimentation of corrosive oxides by focusing thermal energy into the pipe
Minimize impurities being piled by maintaining the target temperature of all exhaust lines with special fiber material.
Without installing any additional devices, solve the problem of getting compressive impurities in Chamber, Fore Line, Exhaust Line during the process of semiconductor by heating the vacuum line with H/J.