Thermal Wet Gas Abatement System – MAT507BW

Description

  • High-temperature catalytic processing facility that combines the fluorine catalyst oxidation technology with wetting technology to simultaneously process combustible and soluble gas and NF3 at high efficiency.
  • Using electric heater and waste gas reaction heat without separate fuel (LNG) combustion, it causes very low thermal NOX by oxidizing waste gas.
  • The cartridge can be maintained conveniently while minimizing contamination in FAB by applying a swap method for exchanging and retrieving Cartridge in the field without cleaning

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