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UV Irradiator
EXR-1200 FMUV

Teikoku UV Irradiation equipment is designed with simplicity in mind for greater MTBF and MTTR for a lower cost of ownership. The UV intensity and exposure are controlled in real time and it automatically adjusts itself by providing proper exposure dosage limits. The dosage limits can be set in recipe control.

Features:
  • UV Irradiation equipment for dicing tape. For wafers up to 300mm
  • All parameters important for UV irradiation can be controlled in the recipe
  • Settings can be quickly changed to process different wafer/frame sizes
  • Longer-lasting UV lamp realized by TTS's proprietary UV technology
  • Other optional features are available
Please contact us for more information