Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

Wafer Batch ID Reader System
WID100R

WID100R is mainly designed for 4” wafer size. It is designed with a single port for 4” SEMI Standard 25 Slots Open Cassette. The system enables wafer alignment and wafer ID reading of complete batch in a cassette. With its multi-touch panel PC and easy-to-operate system, the user can read any wafer ID and slot position inside the carrier in just a few seconds. The compact design of the WID100R comes with the cassette presence and tilted sensor for cassette placement and wafer ID placement. The mapping, wafer alignment and wafer ID reading are controlled by the recipe created.
Specifications
  • Designed for 100mm Wafer
  • 1x Open Cassettes Station (Based on Sample Cassette Provided)
  • Cassette Orientation Sensors (Detect Reverse Placement of Cassette), Cassette Present and Cassette Tilt Sensors.
  • In-Cassette Wafer Slot Mapping Function
  • Wafer Orientation Flat Alignment Mechanism Integrated.
  • Programmable Wafer Rotation for Various Wafer ID Locations.
  • Batch Wafer ID Reading (Front & Back also wafer ID on Orientation Flat Area)
  • Recipe Controlled Mapping, Alignment & Wafer ID Reading.
  • SECS/GEM Communication Tools (Optional)
Please contact us for more information