Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

Wafer Batch ID Reader System
WID150R

WHS150R is mainly designed for 6" wafer size. This system is suitable for SEMI Standard 6" 25 slots Open Cassette and it comes with built-in programmable wafer orientation flat alignment. This is to ensure that the wafer is in a right orientation before scanning the ID. Moreover, WHS150R is equipped with Multi-Touch Panel PC & Graphic User Interface (GUI) customization.
Specifications
  • For 6” Wafer
  • 1x Open Cassettes Station
  • Cassette Orientation Sensors (detect reverse placement of cassette)
  • Cassette “Present” and “Tilt Sensors.
  • In-Cassette Wafer Mapping Function
  • Wafer Orientation Flat Alignment mechanism integrated.
  • Programmable Wafer Rotation for various Wafer ID locations.
  • Batch Wafer ID Reading (Front & Back also wafer ID on Orientation Flat area)
  • Recipe Controlled mapping, alignment & Wafer ID reading.
  • IOSS OCR Reader
  • Signal Light Bar for Operation Status (Red, Yellow, Green and Blue)
  • Cassette Map File with xml format.
  • Multi-Touch Panel PC & Windows Base GUI
  • Optional SESC-GEM Interfaces
Please contact us for more information