Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

Wafer Packing System
​WPS3200

Specifications
  • 2 x Open Cassettes station with integrated Wafer Protrusion Detection
  • Sensor (Universal for both 6” & 8”)
  • 2 x Wafer Canister Station (Configurable to 1x Canister and 1x Wafer Jar with
  • Cartesian Robot Module)
  • 1x Interleaf Paper Port (Auto-conversion between 6” & 8”)
  • Hirata 4-axis robotic arm with wafer flipping feature.
  • Built-in Sensor for wafer , interleave paper or ring spacer detection and built-in
  1. Height Sensor on Canister & Wafer Jar Loading Port for accurate robotic handling.
  2. (1x Height Sensor on “Separator Canister” Port.)
  • Cartesian Robot Module for wafer jar handling (Optional)
  • Wafer Ring Separator Handling Module for canister . Optional)
  • TCP-IP & RS232 data interfaces/ SECS/GEM data communication (Optional)
Please contact us for more information
Please contact us for more information