Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Inverted Metallurgical Microscope
ECLIPSE MA200
Inverted Metallurgical Microscope
ECLIPSE MA100N
More Information
More Information
Assuring you our best, always

Wafer Weight Sorting System
WHS2150W

The WHS2150W Wafer Weight Sorting System allows to determine the weight of each wafer before it be sorted into few of the clamshells or half-height open cassette. It is designed for 6" of the wafer sizes. Wafer is transferred from open cassette to clamshell for Spin-Rinse-Dry (SRD) process. Weight of each wafer in clamshell for Pre-Rough process is determined. The wafers sort to the clamshell/half-height open cassette according to their weight loss range. All the wafers will be transferred back to the open cassette once all of wafers achieve the weight required after going through repeating SRD process.
Specifications
  • Designed for 150mm Wafer
  • Mettler Toledo High Precision Weighing Module, WXT Series with Custom Designed Enclosure.
  • Hirata 4-Axis Dual Arm ATM Robot
  • IOSS WID120 OCR Reader Integrated into Hirata Pre-Aligner Module for 6” Wafer.
  • 3 x Workcells with 4 Load Ports. (LP1 for Peek Cassette, LP2, LP3 & LP4 with Universal Design to accept Clamshell or Half-Height Open Cassette with Conversion.)
  • Touch-screen HMI with Customized Software for Weight Sorting.
  • TCP/IP Network Interface or SECS/GEM Data communication (Optional)
Please contact us for more information