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Wafer Weight Sorting System
WHS2150W
Wafer Weight Sorting System
WHS2150W
The WHS2150W Wafer Weight Sorting System allows determining the weight of each wafer before it is sorted into a
few
of the clamshells or half-height open cassette. It is designed for 6" of the wafer sizes. The wafer is transferred from open cassette to clamshell for Spin-Rinse-Dry (SRD) process. The weight of each wafer in a clamshell for Pre-Rough process is determined. The wafer sort to the clamshell/half-height open cassette according to their weight loss range. All the wafers will be transferred back to the open cassette once all of the wafers achieve the weight required after going through the repeating SRD process.
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