Semi-Automatic Production Probe Stations – Pegasus™ S200 & S300

  • The Pegasus™ S series wafer probers are specifically designed for production probing and are particularly effective for low volume probing, design verification, failure analysis and for probing packaged components.
  • The S200 is especially recommended for probing semiconductors, light-emitting diode (LED) and microelectromechanical systems (MEMS).


The Pegasus™ S200 and S300 semi-automatic wafer probers offer an economical probing platform for rapid testing of full and partial wafers up to 300 mm.

The Pegasus™ S200 is suitable for wafer sizes up to 200 mm (8″), whilst the S300 caters for wafers up to 300 mm (12″). Both models boast the same versatile design and a host of different configuration options.

Pegasus™ S series wafer probers feature a precision stage for fine resolution and repeatable accuracy. The modular design accommodates a wide range of productivity-enhancing and field upgradeable options to ensure capabilities can be extended to suit future requirements.

Probing is accomplished with either cantilever probe cards or micromanipulators, for example, the Pegasus™ probe, a fully adjustable manual manipulator with built-in height detection, edge sensing, quick needle replacement and adjustable gram force setting. In addition, a variety of standard and custom chuck plates are available for a wide range of applications.

The Pegasus™ S series stage mechanism, microscope mount and multiple computer-aided probes can all be controlled with simple joystick action. They can also be operated using all industry-accepted communications protocols.

  • Fast probing up to 100 mm/sec
  • TTL, Ethernet (10BaseT), RS232 and IEEE 488 optional
  • Easy integration of cameras and other external test equipment
  • Remote and integral keyboard for easy control
  • Active wafer profiling using Pegasus™ probes
  • Semi-automatic two-point wafer alignment to reduce set-up time
  • Additional axes available for auxiliary control of probing accessories
  • A motorized platform for setting upper and lower safety limits for probe cards

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