Description
The Pegasus™ S200 and S300 semi-automatic wafer probers offer an economical probing platform for rapid testing of full and partial wafers up to 300 mm. The Pegasus™ S200 is suitable for wafer sizes up to 200 mm (8″), whilst the S300 caters for wafers up to 300 mm (12″). Both models boast the same versatile design and a host of different configuration options.
Pegasus™ S series wafer probers feature a precision stage for fine resolution and repeatable accuracy. The modular design accommodates a wide range of productivity-enhancing and field upgradeable options to ensure capabilities can be extended to suit future requirements. Probing is accomplished with either cantilever probe cards or micromanipulators, for example, the Pegasus™ probe, a fully adjustable manual manipulator with built-in height detection, edge sensing, quick needle replacement and adjustable gram force setting. In addition, a variety of standard and custom chuck plates are available for a wide range of applications. The Pegasus™ S series stage mechanism, microscope mount and multiple computer-aided probes can all be controlled with simple joystick action. They can also be operated using all industry-accepted communications protocols.
Pegasus™ S series wafer probers feature a precision stage for fine resolution and repeatable accuracy. The modular design accommodates a wide range of productivity-enhancing and field upgradeable options to ensure capabilities can be extended to suit future requirements. Probing is accomplished with either cantilever probe cards or micromanipulators, for example, the Pegasus™ probe, a fully adjustable manual manipulator with built-in height detection, edge sensing, quick needle replacement and adjustable gram force setting. In addition, a variety of standard and custom chuck plates are available for a wide range of applications. The Pegasus™ S series stage mechanism, microscope mount and multiple computer-aided probes can all be controlled with simple joystick action. They can also be operated using all industry-accepted communications protocols.
KEY FEATURES
- Fast probing up to 100 mm/sec
- TTL, Ethernet (10BaseT), RS232 and IEEE 488 optional
- Easy integration of cameras and other external test equipment
- Remote and integral keyboard for easy control
- Active wafer profiling using Pegasus™ probes
- Semi-automatic two-point wafer alignment to reduce set-up time
- Additional axes available for auxiliary control of probing accessories
- A motorized platform for setting upper and lower safety limits for probe cards
