Pegasus™ S series wafer probers feature a precision stage for fine resolution and repeatable accuracy. The modular design accommodates a wide range of productivity-enhancing and field upgradeable options to ensure capabilities can be extended to suit future requirements.

Probing is accomplished with either cantilever probe cards or micromanipulators, for example, the Pegasus™ probe, a fully adjustable manual manipulator with built-in height detection, edge sensing, quick needle replacement and adjustable gram force setting. In addition, a variety of standard and custom chuck plates are available for a wide range of applications.

The Pegasus™ S series stage mechanism, microscope mount and multiple computer-aided probes can all be controlled with simple joystick action. They can also be operated using all industry-accepted communications protocols.