Wafer Batch Transfer System ​- WTS100G


WTS100G is designed for transferring, splitting, merging or flipping the 4” wafer and 6” wafer from the input cassette in batch mode. It consists of two load ports which one input load port and one output load port. The load port equipped with a high precision sensor for wafer and cassette placement detection. The sorting method for this, the transfer from 4” SEMI Standard Open Cassette to 4” SEMI Standard Open Cassette/Clamshell or 6” SEMI Standard Open Cassette to 6” SEMI Standard Open Cassette/Clamshell
  • Designed for 100mm & 150mm Wafer Size
  • Cassette Type: SEMI Standard Open Cassette & Clamshell
  • Consist of Two Load Ports (One Input and One Output)
  • Built-in Programmable Wafer Orientation Flat Alignment
  • In-Cassette Wafer Mapping Function
  • Batch Wafer Transfer from Input Cassette to Output Cassette
  • Single Wafer Sorting (Sequential Wafer Arrangement)
  • Batch Wafer Merging (Odd + Even Slots)
  • TCP/IP Networking For Interface With Host Map-Server, and Storage Of Map Data Over The Network
  • SECS/GEM Communication Tools (Optional)

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