Description
Magnetic Field Canceller
The Active Magnetic Field Canceller AMC-331 is designed to suppress magnetic field fluctuations that can adversely affect electron beam application devices such as electron microscopes. This system detects magnetic field fluctuations using a high-sensitivity magnetic field sensor and generates magnetic fields of opposite phases with a Helmholtz coil to counteract these fluctuations.
The Active Magnetic Field Canceller AMC-331 is designed to suppress magnetic field fluctuations that can adversely affect electron beam application devices such as electron microscopes. This system detects magnetic field fluctuations using a high-sensitivity magnetic field sensor and generates magnetic fields of opposite phases with a Helmholtz coil to counteract these fluctuations.
Causes of Fluctuating Magnetic Fields
Magnetic field fluctuations can be caused by various factors, including the movement of magnetic materials (such as cars, elevators, and trains), power noise (50 or 60 Hz), and the influence of peripheral devices. These fluctuations can significantly impact the performance of precision instruments, making effective magnetic field cancellation essential.Helmholtz Coil
The Helmholtz coil used in the AMC-331 consists of coils connected in series with the same number of turns arranged in parallel. When a current passes through the coil, it generates a magnetic field in the axial direction, effectively counteracting external magnetic field fluctuations.Key Features
- High Performance: The AMC-331 offers excellent attenuation performance, reducing magnetic field fluctuations by up to 40-60 dB.
- Low Cost: This system achieves approximately 1/10 the cost compared to traditional magnetic field shielding measures.
- Easy Installation: The AMC-331 is easy to install by fixing the coil around the device, making it a practical solution for various applications.
- Control Method: The system uses DC representative value control combined with independent feedback control for each axis, ensuring precise and effective magnetic field cancellation.
- Control Range: The AMC-331 operates within a control range of ± 15 μT, making it suitable for a wide range of applications.
- Control Frequency: The system effectively controls magnetic field fluctuations from quasi DC to 1kHz, providing comprehensive protection for sensitive equipment.
Applications
The AMC-331 is ideal for use with various precision instruments, including:- Scanning electron microscopes (SEM)
- Transmission electron microscopes (TEM)
- Focused ion beams (FIB)
- Mass spectrometers (MASS)
- Electron beam lithography apparatus (EBL)
- Mask inspection devices
- Wafer observation measurement SEM


