Vibration Isolation Table for Electron Microscopes

The Active Vibration Isolation Table for Electron Microscopes is a low-height floor type table designed to provide exceptional vibration isolation and damping capabilities. This table is ideal for electron microscopes, ensuring precise control and stability in various applications. With its lowest possible floor height, XYZ direction control, and rotation axis management, this table offers unparalleled performance.

One of the key features of this vibration isolation table is its ability to maintain a noise-free environment through the Active Vibration Isolation (AVI) System combined with the Active Magnetic Field Canceller AMC-331. This system effectively cancels both AC and DC electromagnetic interference (EMI) simultaneously, ensuring optimal performance of sensitive equipment. The table’s aluminum frame structure is designed to fit the installation environment, providing high performance, low cost, and easy installation.

The table’s specifications include external dimensions of 900 x 1100 x 152 mm (ascent 155 mm), a product mass of 320 kg, and a loading weight limit of 1000 kg. It operates on clean dry air (0.6 MPa or more) and requires a single-phase power supply (100-240V, 50/60Hz). The installation surface must be below 2 mm to ensure stability.

The Active Vibration Isolation Table also features excellent vibration isolation performance from low frequencies, achieved through 6DOF active control. This level of control cannot be obtained by passive isolation methods. The table’s small air consumption, which is only 1/10 of Tokkyokiki’s conventional AVI, allows it to share the CDA from the compressor used for the electron microscope’s internal passive isolator.

In addition to its vibration isolation capabilities, the table includes an Acoustic Enclosure PNC series, which provides sound insulation performance of more than 20 dB. This enclosure is easy to install and offers high flexibility, with a lightweight material that does not require heavy machinery for setup. The enclosure’s complex board, consisting of sound absorption and insulation material, ensures excellent sound insulation performance from low to high frequencies.

The global market for microscope vibration isolation tables is experiencing steady growth, driven by the increasing demand for high-precision microscopy in research, healthcare, and industrial applications.