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Fully-automatic Tape Remover – 200mm
- A tape remover for wafers up to 200mm(8inches).(4-,5-,6-,and 8-inch)
- All parameters important for de-taping can be controlled in the recipe.
- Longer-lasting UV lamp realized by TTS’s proprietary UV technology
- Can be used with ultra-thin wafers.
- Other optional features are available