Fully-automatic Tape Remover – 200mm

  • A tape remover for wafers up to 200mm(8inches).(4-,5-,6-,and 8-inch)
  • All parameters important for de-taping can be controlled in the recipe.
  • Longer-lasting UV lamp realized by TTS’s proprietary UV technology
  • Can be used with ultra-thin wafers.
  • Other optional features are available

Description

SPECIFICATIONS

PowerAC200-240V,Single Phase
Power Consumption2KVA[Without UV] 3KVA[With UV]
Clean Air Pressure(CDA)0.5 – 0.6 MPa( Min Flow Rate:120NL/min)
Vacuum650 – 750mmHg( Min Flow Rate:60NL/min)
Nitrogen(For UV)0.2 – 0.4 MPa( Min Flow Rate:20NL/min)
Exhaust Duct Capacity1.0m3/min,10mmH20(100mm diameter SUS Flange duct connection)

 

System Arrangement

Dimension(WxDxHmm)1250×1390×1690
Net WeightAppx 500Kg

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