Fully-automatic Wafer Tape Mounter – 300mm

  • A wafer tape mounter for wafers of 300mm.(optionally available:8inches)
  • All parameters important for attaching a wafer onto a frame can be controlled in the recipe.
  • Can be used with ultra-thin wafers.(such as shaped or reworked wafers)
  • Inline UV irradiation and BG de-taping feature available.(options)
  • Longer-lasting UV lamp realized by TTS’s proprietary UV technology
  • Other optional features are available

Description

SPECIFICATIONS

PowerAC200-240V,Single Phase
Power Consumption2KVA[Without UV] 3KVA[With UV]
Clean Air Pressure(CDA)0.5 – 0.6 MPa( Min Flow Rate:120NL/min)
Vacuum650 – 750mmHg( Min Flow Rate:60NL/min)
Nitrogen(For UV)0.2 – 0.4 MPa( Min Flow Rate:20NL/min)
Exhaust Duct Capacity1.0m3/min,10mmH20(100mm diameter SUS Flange duct connection)

 

System Arrangement

Dimension(WxDxHmm)1900×2500×1900
Net WeightAppx 1800Kg

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