Precision Vibration Control

The Desk Type Vibration Isolation Table DHS/DAS is designed to meet the increasing demands of ultra-precision processing fields, including the semiconductor industry. As manufacturing, inspection, and measurement processes become more precise, reaching levels of nanometers and angstroms, our OS float desks provide an ideal isolation space for ultra-fine vibrations.

Our series of OS float desks boasts a rich lineup capable of accommodating the weight and size of inspection equipment used with semiconductors and liquid crystal substrates. The simple design is tailored to fit seamlessly into production inspection lines, featuring a beautifully configured system with a variety of options to suit different needs.

One of the key features of our vibration isolation table is its stable vibration transmission characteristics, which suppress the generation of modes up to 100Hz, despite low eigenvalues. This is achieved using our patented “SBM mechanism” (PAT.P/USP) as the horizontal direction isolator. The SBM mechanism allows for low eigenvalues horizontally, maintaining a constant horizontal natural frequency regardless of the weight of the mounted equipment.

We have commercialized a new type of air spring, the swing ball (SBM) mechanism, which is a unique vibration isolation technology developed from our active vibration isolation expertise. By adopting this SBM mechanism, we can now suppress the rolling mode, which was challenging with conventional air springs. This, combined with the optimally designed gantry unit, enables reliable vibration isolation over a wide range of frequencies, maximizing the performance of the onboard equipment.

The global market for vibration isolation tables is experiencing steady growth, driven by the increasing demand for high-precision equipment in various industries. According to market analysis, the vibration isolation tables market is expected to grow at a CAGR of 5.5% from 2022 to 2030. This growth is fueled by advancements in technology and the rising need for precise vibration control in semiconductor manufacturing, aerospace engineering, and biomedical research.

Our Desk Type Vibration Isolation Table DHS/DAS is designed to provide stable and reliable vibration isolation, ensuring the highest levels of precision and performance for your equipment. Whether you are working in semiconductor manufacturing, liquid crystal substrate inspection, or other ultra-precision processing fields, our vibration isolation tables offer the ideal solution to meet your needs.

Investing in our vibration isolation tables means investing in the future of your operations. With our comprehensive range of products and expertise in vibration control, we are committed to helping you achieve the highest levels of precision and performance. Explore our offerings today and discover how our solutions can transform your processes and outcomes.