Description
WID150R is mainly designed for 6” wafer size. This system suitable for 6” SEMI Standard 25 Slots Open Cassette and it comes with built-in programmable wafer orientation flat alignment in order to ensure the wafer in the right orientation before scanning the ID. The tools Moreover, WID150R equipped with Multi-Touch Panel PC & GUI Customization. The user-friendly system and easy-to-operate system assist the user to operate them easily.
Specifications
- Designed for 6” Wafer
- 1x Open Cassettes Station (Based on sample cassette provided)
- Cassette Orientation Sensors (Detect reverse placement of cassette) and Cassette “Present” and “Tilt Sensors.
- In-cassette wafer slot mapping function
- Wafer orientation flat alignment mechanism integrated.
- Programmable wafer rotation for various wafer ID locations.
- Batch wafer ID reading (Front & Back with the wafer ID on orientation flat area)
- Recipe controlled mapping, alignment & wafer ID reading.
- TCP-IP & RS232 data interfaces/ SECS/GEM data communication (Optional)
