Wafer Stocker and Sorting System – WST1000

The Wafer Stocker and Sorting System is integral to efficient semiconductor manufacturing, offering automated solutions for organizing and handling wafers throughout the production process. These systems streamline the storage and retrieval of wafers, ensuring that each wafer is accurately sorted and readily available for subsequent processing stages.

By automating these tasks, the Wafer Stocker and Sorting System enhances production efficiency, reduces handling errors, and supports high-volume semiconductor manufacturing environments. This automation is crucial for maintaining the flow of materials and ensuring that wafers are processed in the correct sequence, ultimately contributing to higher yields and better product quality.

Description

WST1000 is an automated sorter and stocker system for 6” and 8” wafer. System comes with 4x load ports, 2x disposal port, 2x robotic arms for efficient wafer handling and 2x carousels for wafer storage. Hirata 4-axis dual arm in the sorter module is integrated with wafer mapping sensor for presence, absence, and cross slot of wafers in the cassette while stocker module uses a 3-axis single robot arm on a YZ gantry to store the wafers in the carousels. System equipped with wafer pre-aligner to ensure wafer centering and orientation alignment for wafer ID reading and thickness measurement. The key functions includes the lot validation, sorting, disposal, storage and retrieval of wafer.

Specifications
  • 4x 6” and 8” Open Cassette Load Port
  • 2x 6” and 8” Disposal Load Port
  • 2x Carousels
  • Hirata 4-Axis Dual Arm ATM Robot with Linear Actuator
  • 3-Axis Single Arm ATM Robot on YZ Gantry Mechanism
  • Hirata Wafer Pre-aligner
  • IOSS WID120 OCR Reader
  • Wafer Thickness Measurement Module
  • HEPA Filter
  • SECSGEM Communication Protocol
  • RFID Cassette ID Reader

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