Description
The MPT1000 is Chapman Instruments’ latest non-contact system, providing wafer thickness measurements. It can be used as a production tool for in-line quality inspection, a research and development tool for establishing standards, and compiling data for enhancing productivity. The MPT1000 utilizes a sophisticated non-contact measurement technology with a focused laser spot on the wafer surfaces. Users can measure structured taped wafers after backgrind or dicing. The powerful, user-friendly, Windows® based operational software can be programmed to provide automated wafer thickness maps, execute a series of measurements, or report the data offline for further analysis.
Measurement Capabilities
Wafer Specifications
Wafer Size: 50mm – 300mm
Wafer Material: Si, Ge, InP, GaAs, Glass
Wafer Type: Bare wafer, Pattern Wafer, Bump wafer
Wafer Mounting: Film frame & Bare wafer
Flat/Notch: All SEMI Standard
Conductivity: P or N type
- Wafer thickness
- Total Thickness Variation (TTV)
- Bow and Warp
- Tape Thickness
- Surface Roughness (Optional)
- SECS/GEM (Optional)
- Pattern Recognition
Wafer Specifications
Wafer Size: 50mm – 300mm
Wafer Material: Si, Ge, InP, GaAs, Glass
Wafer Type: Bare wafer, Pattern Wafer, Bump wafer
Wafer Mounting: Film frame & Bare wafer
Flat/Notch: All SEMI Standard
Conductivity: P or N type
