Wafer Thickness & Roughness Measuring System – MPT1000

Non-Contact Automatic Thickness Measurement System

  • Sophisticated dual non-contact measurement technology
  • Measure wafer geometry parameters: thickness, bow and warp
  • System available in fully automated and semi-automated configurations
  • When equipped with optional surface roughness module, the MPT1000 is the most complete solution for advanced wafer metrology
  • Fully auto configuration with robot available AGV and OHT compatible

Description

The MPT1000 is Chapman Instruments’ latest non-contact system, providing wafer thickness measurements. It can be used as a production tool for in-line quality inspection, a research and development tool for establishing standards, and compiling data for enhancing productivity. The MPT1000 utilizes a sophisticated non-contact measurement technology with a focused laser spot on the wafer surfaces. Users can measure structured taped wafers after backgrind or dicing. The powerful, user-friendly, Windows® based operational software can be programmed to provide automated wafer thickness maps, execute a series of measurements, or report the data offline for further analysis.
Measurement Capabilities
  • Wafer thickness
  • Total Thickness Variation (TTV)
  • Bow and Warp
  • Tape Thickness
  • Surface Roughness (Optional)
  • SECS/GEM (Optional)
  • Pattern Recognition

Wafer Specifications

Wafer Size: 50mm – 300mm
Wafer Material: Si, Ge, InP, GaAs, Glass
Wafer Type: Bare wafer, Pattern Wafer, Bump wafer
Wafer Mounting: Film frame & Bare wafer
Flat/Notch: All SEMI Standard
Conductivity: P or N type

Technology & Expertise Focus

✅ Cutting-Edge Precision: Industry-leading testing and measurement tools with advanced metrology and automation solutions.
✅ Comprehensive Equipment Range: From non-destructive testing (NDT) tools to automated optical inspection (AOI) systems, we cover all your needs.
✅ Industry Trusted: Serving top manufacturers in semiconductor, automotive, metal, and electronics industries.
✅ Global Support & Service: With a dedicated team of experts, we provide end-to-end testing solutions across multiple regions.