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Plasma System – Quadrio α High Volume Plasma System

  • With maximum uniformity, superior gas and RF distribution, a proprietary controlling software and compliance to CE and SEMI international standards, our plasma cleaning and etching systems are ideal for all applications where process reliability and repeatability are a must.
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Description

Quadrio α is a compact standalone plasma cleaning system suitable for substrates with a strip form factor.

Capable of performing PE and RIE processes, the Quadrioα provides high uniformity reliable results with a competitive throughput.
 

Product Features:

Quadrio α comes in two versions:

  • Quadrioα 4 with 4 tracks, 400 UPH*
  • Quadrioα 5 with 5 tracks, 500 UPH*
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Technology & Expertise Focus

✅ Cutting-Edge Precision: Industry-leading testing and measurement tools with advanced metrology and automation solutions.
✅ Comprehensive Equipment Range: From non-destructive testing (NDT) tools to automated optical inspection (AOI) systems, we cover all your needs.
✅ Industry Trusted: Serving top manufacturers in semiconductor, automotive, metal, and electronics industries.
✅ Global Support & Service: With a dedicated team of experts, we provide end-to-end testing solutions across multiple regions.
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