Plasma System – Titan Batch Plasma System

  • With maximum uniformity, superior gas and RF distribution, a proprietary controlling software and compliance to CE and SEMI international standards, our plasma cleaning and etching systems are ideal for all applications where process reliability and repeatability are a must.


Titan Batch Plasma System

Titan is a standalone batch plasma cleaning system specially designed to process 6 magazines per cycle.

Titan’s chamber configuration ensures uniform plasma distribution to guarantee effective cleaning and activation across all the substrates.

Product Features:

The features contained in this system allow reliable and repeatable cycling of the plasma process for 24/7 operation.

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