Plasma System – Aeon Batch Plasma System

  • With maximum uniformity, superior gas and RF distribution, a proprietary controlling software and compliance to CE and SEMI international standards, our plasma cleaning and etching systems are ideal for all applications where process reliability and repeatability are a must.


Aeon Table-Top Batch Plasma System

Aeon is a compact standalone batch plasma cleaning system.

It includes all the subassemblies necessary to deliver excellent cleaning and surface modification results.

Product Features:

The features contained in this system allow reliable and repeatable cycling of the plasma process to guarantee a smooth 24/7 operation.

Aeon’s strength is its flexibility. This system comes with different configurations to best adapt to your plasma process’ needs.

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