Plasma System – Juno Batch Plasma System

  • With maximum uniformity, superior gas and RF distribution, a proprietary controlling software and compliance to CE and SEMI international standards, our plasma cleaning and etching systems are ideal for all applications where process reliability and repeatability are a must.


Juno Batch Plasma System

Juno is a standalone batch plasma cleaning system.

Juno’s chamber can accommodate a variable number of shelves, this allows the flexibility of handling multiple hybrid substrates.

Product Features:

​The features contained in this system allow reliable and repeatable cycling of the plasma process for 24/7 operation.

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