Plasma System – Juno Batch Plasma System

With maximum uniformity, superior gas and RF distribution, a proprietary controlling software and compliance to CE and SEMI international standards, our plasma cleaning and etching systems are ideal for all applications where process reliability and repeatability are a must.

Description

Juno is a standalone batch plasma cleaning system.

Juno’s chamber can accommodate a variable number of shelves, this allows the flexibility of handling multiple hybrid substrates.

Product Features:

The features contained in this system allow reliable and repeatable cycling of the plasma process for 24/7 operation.