Fully-automatic Tape Remover – 300mm

  • A tap remover for wafers of 300mm(optionally available:8inches)
  • Single and double cassette loading
  • All parameters important for de-taping can be controlled in the recipe.
  • Longer-lasting UV lamp realized by TTS’s proprietary UV technology
  • Can be used with ultra-thin wafers.
  • Other optional features are available.



PowerAC200-240V,Single Phase
Power Consumption2KVA[Without UV] 3KVA[With UV]
Clean Air Pressure(CDA)0.5 – 0.6 MPa( Min Flow Rate:120NL/min)
Vacuum650 – 750mmHg( Min Flow Rate:60NL/min)
Nitrogen(For UV)0.2 – 0.4 MPa( Min Flow Rate:20NL/min)
Exhaust Duct Capacity1.0m3/min,10mmH20(100mm diameter SUS Flange duct connection)


System Arrangement

Net WeightAppx 800Kg

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