Description
H series is a high-end comprehensive manual test probe configuration, the device has excellent stability and maneuverability, and the test precision are higher than that of the rest of the industry brand, unique pneumatic chuck mobile technology flexible UPStart modular structure design enhance sexual shockproof system, these are all SEMISHARE advanced innovation technology advantage in the industry.
At the same time, the equipment can support late expansion and upgrading, to meet the needs of customers for a variety of test applications. No matter now or in the future, when customers’ test needs increase or change, the equipment can be reconfigured and upgraded to truly realize multiple applications with one machine.
The equipment is very suitable for the one-step budget acquisition and investment of r&d centers and laboratories in universities.
| Product number | H6/H8/H12 | working environment | Open type |
| electricity demand | 220V,50~60Hz | Control method | Manual Probe Station |
| Product Size | 1300MM long *920MM wide *920MM high | equipment weight | About 300 kg |
It is suitable for scientific research and analysis of nano micro devices, spot check and detection, etc., to quickly analyze and test the circuit of the chip on the wafer and judge the product performance by the electrical parameters, and then reduce the loss of the chip defects to the product, so as to improve the yield and carry the rf characteristic test and upgrade and carry the optical fiber spectrum characteristic test.
Chuck Air bearing move technology
Pneumatic type mobile platform has the function of fast moving chuck, can meet the needs of efficient manual test by the corresponding gas float switch, provides three kinds of method of fast moving: one hand control X/Y direction fast moving, hands control samples total plane fast moving traditional ball/bearing type samples can only achieve X/Y axis one-way movement, and movement speed slower;Although the ordinary air-floating sample table can realize full plane rapid movement of the sample table, it cannot realize one-way accurate movement positioning of the X/Y axis, which can meet the needs of production measurement. The 3-weight air-controlled sample table perfectly combines and realizes the above two functions.Large handle differential head drive
Chuck the mobile platform is equipped with coarse and fine adjustment function, fine adjustment knob driven by the industry’s top Japan Mitutoyo big handle differential head, small compared with the traditional differential head adjustment, feel more comfortable to adjust operation more smoothly and no return bad, really realize super smooth efficient test manually, improve test efficiency, saving the cost of customer tests.Microscope air – controlled lifting control
The microscope can rise and fall 50mm by means of air control. The microscope can rise and fall smoothly by means of high quality valve control and fine adjustment of high pressure air inlet and outlet throttling, so as to facilitate the replacement of objective lens and better protect against accidental contact damage between objective lens and fixture in the test.Three – stage lifting needle base platform
The needle seat platform can rise and fall rapidly (0,300um,3mm)+ fine adjustment (40mm, moving resolution 2~5um). All parts of Platen can rise and fall at the same time (there is no different phenomenon). After rising and falling, the repeatability of the probe in x, Y and Z directions of needle marks on the pad is better than that of othersThe 1um, repeatable (1 m) needle base platform has three discrete positions for contact, separation (300 m) and loading (3mm) and is equipped with a safety lock to prevent accidental damage to the probe or wafer while providing intuitive control and accurate contact positioning for the most accurate measurement. This function is important in high frequency and high power testing.Loadable laser
Multiband laser cutting system can be applied to a load in the vast majority of microscope on the analysis of the failure, can realize precise cutting and selective onlookers level material removal precision and reliable advanced laser transmission system (ABDS) can choose different band to deal with different material cutting and cutting work laser output energy of 2.7 mJ, largest energy adjustable series 300 water cycle cooling structure make the system more compact and dispensing with maintenance.| H series | ||||
| Specification | ||||
| Model | H6 | H8 | H12 | |
| Dimension | L: 820mm* W: 720mm* H: 890mm | L: 960mm* W: 850mm* H: 900mm | L: 1300mm* W: 920mm* H: 920mm | |
| Weight (about) | 170KG | 230KG | 300KG | |
| Electricity Demand | 220VC, 50~60Hz | |||
| Chuck | Size & Rotation angle | 6″, 360° Rotation | 8″, 360° Rotation | 12″, 360° Rotation |
| X-Y Travel range | 6″ * 6″ | 8″ * 8″ | 12″ * 12″ | |
| Moving resolution | 1μm | |||
| Sample fixed mode | Vacuum adsorption | |||
| Electrical design | Electrical Floating with Banana plug adapter, can be used as a backside electrode | |||
| Platen | U shape platen | 6 micropositioners available | 8 micropositioners available | 12 micropositioners available |
| Move range & adjustment mode | Platen can be quickly lifted up and down 6mm for fast probe tip seperation | |||
| Platen can be fine tuned up and down 25mm precisely with 1μm resolution | ||||
| Microscope | Travel range | X-Y axis : 2″ * 2″, Z axis : 50.8mm | ||
| Moving resolution | 1μm | |||
| Switching object lens | Microscope tilting 30°manually by Lever | |||
| Magnification | 20~4000X | |||
| Lens specification | Eyepiece: 10X ; Objective lens : 5X, 10X, 20X, 50X 、100X（option） | |||
| CCD pixels | 50W (Analog) / 200W (Digital) / 500W (Digital) | |||
| Micropositioner specification | X-Y-Z Travel range | 12mm-12mm-12mm / 8mm-8mm-8mm | ||
| Mechanical resolution | 10μm / 2μm / 0.7μm / 0.1μm | |||
| Current leakage accuracy | Coaxial 1pA/V @ 25 ℃; Three shaft 100fA/V @ 25 ℃; Triaxial 10pA@3kv @25°C，Test conditions: dry environment for grounding shield (air dew point lower than – 40 ° C) | |||
| Cable connectors | Banana head / Crocodile clip / Coaxial / Triaxial | |||
| Application | Wafer test, Photoelectric device test, PCB / IC test, RF test, high voltage and high current measurement etc. | |||
