Plasma System – Philo Batch Plasma System

  • With maximum uniformity, superior gas and RF distribution, a proprietary controlling software and compliance to CE and SEMI international standards, our plasma cleaning and etching systems are ideal for all applications where process reliability and repeatability are a must.


Philo Batch Plasma System

Philo is a compact standalone batch plasma cleaning system.

Philo’s chamber contains an automatic tray in which your products can be easily placed to be properly processed. This assures cleaning repeatability and a straightforward operation.

Product Features:

The features contained in this system allow reliable and repeatable cycling of the plasma process for 24/7 operation.

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