Contactless One-Point Wafer Resistivity or Sheet Resistance – Mx 60 Series

  • The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.

Description

The MX60x series measure Resistivity or Sheet Resistance of silicon and other materials.

*1 Option/Feature of MX 604-ST, MX 608, MX 608-q and MX 6012
*2 Option of MX 608, MX 608-q and MX 6012 

Applications

  • Reclaimer
  • R&D
  • In-process control for
  • Thickness
  • TTV
  • Resistivity / Sheet Resistance
  • RRV (partially)
  • Dopant

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