High-temperature catalytic processing facility that combines the fluorine catalyst oxidation technology with wetting technology to simultaneously process combustible and soluble gas and NF3 at high efficiency.
Using electric heater and waste gas reaction heat without separate fuel (LNG) combustion, it causes very low thermal NOX by oxidizing waste gas.
The cartridge can be maintained conveniently while minimizing contamination in FAB by applying a swap method for exchanging and retrieving Cartridge in the field without cleaning