Thermal-Wet Scrubber

Description

  • High-efficiency Removal of SiH4, TEOS, DCS, PH3, TMA…
  • Low energy consumption (CO2 reduction)
  • Anti-clogging/corrosion preparation.
  • c/w Energy Saving Mode
  • Capacity: 500slm, 1000slm, 2000slm, 3000slm

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