Wet Gas Abatement System – MAT520W


  • The MAT502W gas scrubber system is designed to remove or reduce substantially the hazard presented by some gases used during the semiconductors manufacturing process. To achieve this, the scrubber captures the gases via water dissolution for water-soluble gases or changes the chemical composition of them through reaction with water especially in high flow application, for each gas concentration exiting the scrubber is reduced to a level below 1/2 IDLH.

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