Description
- Treating water-soluble waste gas. (HCl, Cl2, HBr, BCl3, TCS…)
- High install base of Metal Etching Process, Epitaxy Process.
- High Removal Rate >99%
- Long up-time.
- Longest maintenance cycle.
- c/w Energy Saving mode.
- Capacity: 500slm, 3000slm, 5000slm
