Wet Scrubber


  • Treating water-soluble waste gas. (HCl, Cl2, HBr, BCl3, TCS…)
  • High install base of Metal Etching Process, Epitaxy Process.
  • High Removal Rate >99%
  • Long up-time.
  • Longest maintenance cycle.
  • c/w Energy Saving mode.
  • Capacity: 500slm, 3000slm, 5000slm

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